Combining state-of-the-art image acquisition and image processing technologies, InVision systems offer excellent defect detection with the highest classification accuracy rates in the industry. InVision systems are used for inspection of all layers in various process steps, such as after deposition, photo, etch and more. InVision provides fast inspection within the process line rate and ensures real time-to-alarm on production excursions.

The InVision family of AOI systems provides high-sensitivity scan, microscopic video images, classification, CD/ Overlay measurements, Macro (Mura) inspection and many more features, all within line index, to contribute to and dramatically improve manufacturers' yield enhancement. Offering inspection of Gen 5 through to the largest glass sizes, together with its integrated metrology functions, InVision is the inline inspection and metrology solution of choice.