Our solutions turn defect and metrology data (statistics, measurements as well as images) into valuable information for Process Managers and engineers. This information helps the them stabilize the production process and deal quickly with any process excursions, in order to maximize yield. EYES-2020 is also used to initiate parts of the setup and programming of Orbotech’s AOI systems, avoiding the need to waste precious inspection time and longer stay inside the Clean Room.
In combination with Orbotech’s AOI systems - EYES-2020 provide comprehensive, intelligent and reliable quality, improved process control and increased yields for manufacturers wanting to lower the bottom-line.
Highlights:
- Remote Image Verification for reviewing micro and macro defect images and metrology results
- Statistical Process Control for defect quantity and distribution
- Statistical Process Control for Critical Dimension and Overlay
- Defect real-time trends and history (root cause) tracing
- Programming and simulation tools for classification and metrology
- Central Database: EYES-2020 client-server configuration, with a central database of defects and images
Benefits:
- One-stop-shop for all inspection and metrology data
- Improves process control
- Review and analysis outside the clean room
- Defect information, metrology data and images are archived for long term process monitoring
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