Advanced FPD Yield Enhancement Solutions for Production Quality Assurance and Process Monitoring
Powerful process data analysis solution providing highly accurate process control in real time
EYES-2020 (Extensive Yield Enhancement System) is an advanced FPD Yield Enhancement Solution for Production Quality Assurance and Process Monitoring.
Orbotech's EYES-2020 is a powerful process data analysis solution providing highly accurate process control in real time. It accumulates and analyzes defect and metrology data, providing highly effective automated analysis of the AOI, Test and Repair generated data
Our solutions turn defect and metrology data (statistics, measurements as well as images) into valuable information for Process Managers and engineers. This information helps them stabilize the production process and deal quickly with any process excursions, in order to maximize yield.
In combination with Orbotech’s AOI, Test and Repair systems - EYES-2020 provides a comprehensive, intelligent and reliable view, for improved process control and increased yields.
Highlights:
- Remote Image Verification for reviewing micro and macro defect images and metrology results
- Statistical Process Control for defect quantity and distribution
- Statistical Process Control for Critical Dimension and Overlay
- Defect real-time trends and history (root cause) tracing
- Central Database: EYES-2020 client-server configuration, with a shared database of defects and images
Benefits:
- One-stop-shop for all inspection, test, repair and metrology data
- Improves process control
- Review and analysis outside the clean room
- Defect information, metrology data and images are archived for long term process monitoring
