Metrology

Cost-effective real-time process monitoring

Orbotech's automated 2D and 3D metrology solutions enable tight process control, using critical dimension, overlay, height and thickness measurements within the AOI process. Instead of moving glass panels to a dedicated, resource-heavy standalone metrology machine, manufacturers can perform these measurements using their AOI for each panel, immediately following defect inspection.

Highlights:

  • Real-time process monitoring
  • Higher sampling rate and enabled by high speed measurement
  • High accuracy and repeatability
  • Inspection and metrology on the same platform 

Benefits:

  • Increases yields while reducing bottom-line manufacturing costs
  • Significantly increases measurements capacity and the level of process control
  • Saves time of glass transfer and offline metrology
  • Saves purchasing stand-alone metrology equipment, clean room space and expenses

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