Metal Deposition

Sigma® Deposition Systems

The Sigma product range supports wafer sizes from 100mm to 300mm with deposition technologies covering conventional PVD through to MOCVD

Metal Deposition Technologies

  • Standard PVD – conventional sputter modules for low topography features
  • Advanced Hi-Fill (AHF) PVD – ionized sputter source for deposition into high aspect ratio features
  • C3M – Virtually conformal metal coverage using MOCVD technology for advanced liner/barrier

Markets Served by PVD

 

Sigma® deposition systems

Sigma® deposition systems

The Sigma product range supports wafer sizes from 100mm to 300mm with deposition technologies covering conventional PVD through...

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