MVD®

Molecular Vapor Deposition (MVD®) Systems

MVD® replaces traditional liquid coating processes with a highly reproducible vapor deposition alternative that is ideal for manufacturing applications.

Typical MEMS devices benefiting from MVD® hydrophobic anti-stiction films include displays, sensors, actuators, RF switches, inkjets, and data storage devices. BioMEMS applications include wetting control in micro-fluidics (lab-on-a-chip, microplates), passivation on implantable devices, requiring biocompatible surface coatings, and devices requiring functionalized surface coatings.

MVD® is also used for commercial applications requiring moisture barriers, anti-corrosion coatings, or release layers for imprinting.

MVD100E

MVD100E

The MVD100E is SPTS's designated tool for R&D or pilot manufacturing. MVD® is finding increasing use in applications requiring moisture...

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MVD300 / MVD300E

MVD300 / MVD300E

The MVD300® (and MVD300E with an EFEM) are designed for high performance, flexibility and reliability for the most demanding high volume...

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MVD4500

MVD4500

The MVD4500 is our panel and large substrate tool. It is capable of handling multiple substrates with sizes up to 930 x 720 mm. It is the only...

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