SPTS Products

Available on a range of wafer handling platforms, SPTS supplies semiconductor wafer processing systems for volume production, R&D or pilot production environments. Served markets include Advanced Packaging, MEMS, LEDs, Power Semiconductors, and High Speed RF-ICs.

Technologies and Process Solutions offered include:

Single Wafer Platforms

SPTS's ICP, DRIE, PECVD, PVD and MOCVD modules are available on 3 wafer handling platforms:

  • fxP® - 100 to 300mm wafer size. Supports Etch, PVD, PECVD, MOCVD and HF Release modules
  • c2L® - 3" to 200mm wafer size. Supports Etch, PVD, PECVD, MOCVD and HF Release modules
  • LPX - 3" to 200mm wafer size. Supports Etch & PECVD modules only

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Plasma Etch

Plasma Etch

Plasma etching involves RF-excitation of a selected gas mixture to create a plasma with the right reactive species to etch any un-masked areas on the wafer surface. The reactions...

Plasma Dicing

Plasma Dicing

Plasma dicing, using Deep Reactive Ion Etching (DRIE) processing, is gaining rapid...

Mosaic™ system for plasma dicing
HF Vapor Release Etch

HF Vapor Release Etch

SPTS offers the broadest range of dry HF vapor release products, from lab systems for...

XeF2 Vapor Release Etch

XeF2 Vapor Release Etch

Isotropic etching of silicon using xenon difluoride is an ideal solution for releasing MEMS...

Metal Deposition

Metal Deposition

The Sigma product range supports wafer sizes from 100mm to 300mm with deposition technologies covering conventional PVD through to MOCVD

Sigma® deposition systems
Molecular Vapor Deposition  (MVD®)

Molecular Vapor Deposition (MVD®)

MVD® replaces traditional liquid coating processes with a highly reproducible vapor deposition alternative that is ideal for manufacturing...

PECVD

PECVD

Plasma Enhanced Chemical Vapor Deposition (PECVD) is a process which uses the energy within the plasma to induce reactions at the wafer surface that would otherwise require higher...

Delta® PECVD
Additive Printing Solutions

Additive Printing Solutions

Inkjet printing is a cost-effective and accurate tool to print a barrier (DAM) to prevent underfill leakage or create keep-out zones between active...

Single Wafer Platforms

Single Wafer Platforms

To address the requirements of both volume manufacturing, pilot production and R&D applications, SPTS offers their etch and deposition process technologies on a range of...

Thermal Products

Thermal Products

Under agreement with SPP Technologies Ltd (SPT), SPTS offers a range of large batch vertical furnaces (LPCVD), and APCVD systems.  We are able to offer both new and...