SPTS’s Omega® Rapier plasma etch solution chosen for SITRI’s 8-inch MEMS fab in Shanghai

NEWPORT, UNITED KINGDOM, January 15, 2018 | SPTS Technologies, an Orbotech company and a supplier of advanced wafer processing solutions for the global semiconductor and related industries, today announced that Shanghai Industrial µTechnology Research Institute (SITRI), an international innovation center established to accelerate the development and commercialization of “More than Moore” to power the Internet of Things, has selected SPTS’s Omega® Rapier plasma etch solution for its 8-inch MEMS fabrication facility in Shanghai, China. SITRI will use SPTS’s industry leading Rapier deep reactive ion etch (DRIE) module for a range of key silicon etch processes including through-silicon-vias (TSV),  for the development and pilot production of next generation MEMS and sensors.  The selection process involved bench-marking the Rapier’s capabilities against a range of other vendors’ deep silicon etch product lines.

Kevin Crofton, Corporate Executive Vice President at Orbotech and President of SPTS Technologies, commented: “The MEMS industry is undergoing device-shrink trends similar to the overall semiconductor industry, where designers and manufacturers are continually challenged to deliver more functionality with lower power consumption and at lower cost. This trend is being fueled by the growth of smarter, more connected and wearable electronics as we move closer to the realization of the Internet of Things.”

Mr Crofton added, “SPTS has worked closely with the world’s leading MEMS manufacturers, foundries and research institutes for more than two decades, which has allowed us to develop advanced MEMS and sensors processing solutions and establish an installed base of over 1200 DRIE modules across the world. This vast experience will allow SITRI to provide high throughput silicon etch solutions and play a key enabling role in the innovation and commercialization of next generation MEMS devices.”

To learn more about SPTS’s full range of industry leading etch and deposition process solutions for MEMS manufacturing, visit SPTS Technologies at MEMS 2018, Booth No.24, 21st – 25th January, in Belfast, Ireland and at SEMICON Korea, Booth No. D636, 31st Jan – 2nd Feb, at the COEX Exhibition Center, Seoul, So. Korea.


About Omega® Rapier Plasma Etch Solution

With an installed base of over 1200 DRIE process modules, SPTS’s industry-leading position is spearheaded by the Rapier module, which etches Si using Bosch switched processing as well as non-switched etching for tapered profiles, wafer thinning and via reveal.

The Rapier features a patented dual plasma source design with independently controlled primary and secondary decoupled plasma zones and independent dual gas inlets. This results in a highly concentrated and uniformed distribution of reactants.

Advantages of the Rapier Si DRIE include:

  • High etch rates
  • Excellent uniformity
  • Precise CD and profile control
  • Low tilt at <0.1⁰
  • Inherent multi-mode flexibility also allows complementary oxide etching within the same hardware.

Delivering unparalleled process capability with world-class productivity and cost of ownership benefits, SPTS’s DRIE process modules are used in a wide variety of applications across multiple end markets, including MEMS, Advanced Packaging and Power Semiconductors.


SITRI (Shanghai Industrial µTechnology Research Institute) is committed to innovation and industrialization of the “More than Moore” technology and Internet of Things applications. As a global collaborative innovation center, the SITRI integrates R&D, engineering and incubation to provide innovative companies and partners with comprehensive services and solutions. The SITRI has established close cooperative relations with many famous enterprises, universities of higher learning and research institutes both at home and abroad, which will help the SITRI realize the efficient industrialization of innovative outcomes and speed up the establishment of the “More than Moore” technology and the Internet of Things ecological system. For more information, visit www.sitrigroup.com.

About Orbotech Ltd.

Orbotech Ltd. is a leading global supplier of yield-enhancing and process-enabling solutions for the manufacture of electronics products. Orbotech provides cutting-edge solutions for use in the manufacture of printed circuit boards (PCBs), flat panel displays (FPDs), and semiconductor devices (SDs), designed to enable the production of innovative, next-generation electronic products and improve the cost effectiveness of existing and future electronics production processes. Orbotech’s core business lies in enabling electronic device manufacturers to inspect and understand PCBs and FPDs and to verify their quality (‘reading’); pattern the desired electronic circuitry on the relevant substrate and perform three-dimensional shaping of metalized circuits on multiple surfaces (‘writing’); and utilize advanced vacuum deposition and etching processes in SD and semiconductor manufacturing (‘connecting’). Orbotech refers to this ‘reading’, ‘writing’ and ‘connecting’ as enabling the ‘Language of Electronics’. For more information, visit www.orbotech.com and www.spts.com.

About SPTS Technologies

SPTS Technologies, an Orbotech company, designs, manufactures, sells, and supports etch, PVD, and CVD wafer processing solutions for the MEMS, advanced packaging, LED, high speed RF on GaAs, and power management device markets. With manufacturing facilities in Newport, Wales, and Allentown, Pennsylvania, the company operates across 19 countries in Europe, North America and Asia-Pacific. For more information about SPTS Technologies, please visit www.spts.com.


Destanie Clarke

Tally Kaplan Porat   

Senior Director, Marketing Communications

Director of Corporate Marketing

SPTS Technologies

Orbotech Ltd.

Tel: +44 7951 203278

Tel: +972 8 942 3603





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