플라즈마 식각

Omega® 식각 시스템

SPTS는 MEMS, 고급 패키징, LED, 고속 RF IC 및 전력 반도체 산업 내의 광범위한 응용 분야를 위한 고급 식각 기술을 제공합니다.
 
식각 기술

Omega® Rapier / DSi / DSi-v

Omega® Rapier / DSi / DSi-v

With an installed base of >1200 DRIE process modules, SPTS’s industry-leading position is spearheaded by the Rapier module, which etches Si using...

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Omega® ICP

Omega® ICP

SPTS ICP process module is highly flexible and etches a wide range of materials including oxides, nitrides, polymers, low aspect ratio Si and...

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Omega® Synapse™

Omega® Synapse™

Omega® Synapse™ etch process module uses a high density plasma source and is designed to etch strongly bonded...

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