Thermal Products

Under agreement with SPP Technologies Ltd (SPT), SPTS offers a range of large batch vertical furnaces (LPCVD), and APCVD systems.  We are able to offer both new and factory-certified re-manufactured furnaces, as well as customer system conversions to meet specific engineering requirements.  The production-proven vertical furnaces deliver superior results, high productivity and the lowest cost of ownership (CoO).

The APCVD product line is based on patented Watkins Johnson (WJ) linear injector technology enables precise, repeatable deposition of doped or undoped films with no transient film properties and uniform gap fill across the wafer.  Only factory-certified re-manufactured APCVD systems (based on WJ-999 / WJ1000 / WJ1500 models) are available.

 

 

Vertical Batch Furnaces

Vertical Batch Furnaces

SPTS는 SPP Technologies, Ltd.와의 계약에 따라 다양한 대형 일괄 수직로를 제공하고 있습니다. 당사는 특정한 엔지니어링 요구 사항을...

APCVD

APCVD

SPTS는 SPP Technologies, Ltd.와의 계약에 따라 SiH4 또는 TEOS 기반 유전체의 기압 CVD를 위한 솔루션을 제공하고 있습니다. 특허받은 Watkins Johnson(WJ)...

APCVD