imec - Silicon Etch for Neural Probes

imec - Silicon Etch for Neural Probes

Download this Case Study illustrating how SPTS's Si DRIE technology is used by imec for manufacturing neural probes for mapping brain activity.

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University of Swansea - "Plasma Etch for Silicon Microneedles"

University of Swansea - "Plasma Etch for Silicon Microneedles"

Illustrates the results of a joint development project between SPTS and University of Swansea to create a process for volume production of silicon microneedles for biomedical applications.

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imec - "Blanket Silicon Etch for Lower Cost TSV"

imec - "Blanket Silicon Etch for Lower Cost TSV"

Discusses the introduction of blanket silicon etching to replace CMP, as part of a joint development project with imec to optimize a manufacturable "TSV-last" route for a multi-wafer stack.

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Skyworks - "Improving MTBC for SiN Etch"

Skyworks - "Improving MTBC for SiN Etch"

Describes how SPTS worked with Skyworks to significantly improve Mean Time Before Clean (MTBC) for a SiN etch step, used in the manufacturing of their GaAs RF devices.

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Qorvo - "Successful Partnering for a Rapid Ramp"

Qorvo - "Successful Partnering for a Rapid Ramp"

Describes how SPTS worked with Qorvo to enable them to successfully install and qualify multiple tools to satisfy the need for a rapid ramp in production of AlN-based BAW filters.

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Information in these downloads may contain forward looking information. For more information, click here: https://www.orbotech.com/fls