The Sigma product range supports wafer sizes from 100mm to 300mm with deposition...
Sigma® Deposition Systems
The Sigma product range supports wafer sizes from 100mm to 300mm with deposition technologies covering conventional PVD through to MOCVD
Metal Deposition Technologies
- Standard PVD – conventional sputter modules for low topography features
- Advanced Hi-Fill (AHF) PVD – ionized sputter source for deposition into high aspect ratio features
- C3M – Virtually conformal metal coverage using MOCVD technology for advanced liner/barrier
Markets Served by PVD