SPTS's c2L Wafer Handling Platform

Cost-effective cluster platform for low volume  or pilot production.

The c2L is an smaller production system for 3 – 8” wafers, supporting up to 3 process modules for flexibility and control. Using industry standard robotics and VCE cassette, the c2L is also available with SMIF as an option.

Inquiry about: c2L Platform

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