SPTS's fxP Wafer Handling Platform.

The ultimate in throughput, availability and productivity.

fxP

The fxP is an 8-sided cluster system supporting up to 6 process modules for the ultimate in throughput, availability and productivity.

Available as a 4 – 8” system with vacuum cassettes that are compatible with SMIF robots or as an 8 – 12” system with an integrated EFEM.

Inquiry about: fxP Platform

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