ICP Etch

The industry leader for compound semiconductor applications

The Omega® ICP process module uses a patented high density plasma source incorporating a radial coil design. The SPTS ICP process module is highly flexible and etches a wide range of materials including oxides, nitrides, polymers, low aspect ratio Si and metals. The ICP module is the industry leader for compound semiconductor applications.

Typical materials:

  • GaAs
  • GaN
  • SixNy
  • BCB and Polyimide

Industries Served by ICP Etch:

Inquiry about: Omega® ICP

Please provide your name
Please provide your name
Please provide your email address
Please provide your telephone number
Please provide your company name
Please enter your message
Please confirm that you have read and agree to the privacy policy

Privacy Policy

×