Designed for research laboratory and small volume production environments.
This compact module includes a three-wafer process chamber, and is designed for research laboratory and small volume production environments.
- An integrated Panel PC, with on-board electronics minimizes cleanroom footprint
- Third generation process chamber has been designed for easy wafer size changes and maintenance
- Wafer loading options include a semi-automatic 3-wafer loader with load lock, and various cluster-based configurations