SPT Microtechnologies (Thermal Products) Application Briefs
University of Swansea - "Plasma Etch for Silicon Microneedles"
Illustrates the results of a joint development project between SPTS and University of Swansea to create a process for volume production of silicon microneedles for biomedical applications.Download
imec - "Blanket Silicon Etch for Lower Cost TSV"
Discusses the introduction of blanket silicon etching to replace CMP, as part of a joint development project with imec to optimize a manufacturable "TSV-last" route for a multi-wafer stack.Download
Skyworks - "Improving MTBC for SiN Etch"
Describes how SPTS worked with Skyworks to significantly improve Mean Time Before Clean (MTBC) for a SiN etch step, used in the manufacturing of their GaAs RF devices.Download
Qorvo - "Successful Partnering for a Rapid Ramp"
Describes how SPTS worked with Qorvo to enable them to successfully install and qualify multiple tools to satisfy the need for a rapid ramp in production.Download