MVD®

分子氣相沈積 (MVD®) 系統

MVD® 採用適用於製造應用的高度可生產性氣相沉積法替代方案取代傳統的液態塗層制程。
受益於 MVD® 疏水防黏滯薄膜的典型 MEMS 裝置包括顯示器、感應器、致動氣、射頻開關、噴墨及資料儲存裝置。BioMEMS 應用包含微流道晶片 (晶片實驗室、微板) 中的濕式控制、可植入裝置上的鈍化 (需要生物相容表面塗層),以及需要功能化表面塗層的裝置。
 
MVD® 也適用於需要防潮層、防腐蝕塗層或是用於壓印的釋放層等的商業應用。
 
產品範圍
MVD100E

MVD100E

The MVD100E is SPTS's designated tool for R&D or pilot manufacturing. MVD® is finding increasing use in applications requiring moisture...

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MVD300 / MVD300E

MVD300 / MVD300E

The MVD300® (and MVD300E with an EFEM) are designed for high performance, flexibility and reliability for the most demanding high volume...

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MVD4500

MVD4500

The MVD4500 is our panel and large substrate tool. It is capable of handling multiple substrates with sizes up to 930 x 720 mm. It is the only...

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