PECVD

Delta® 沈積系統

SPTS 的 Delta PECVD 系統適用於 MEMS、複合(III-V)半導體及先進封裝領域內的各種應用
 

重要優勢

  • 支援 75mm 至 300mm 的晶圓尺寸
  • 輻射狀對稱氣流可實現出色的晶圓內 (WIW) 均勻性
  • 最多 10 個氣體管線和可選的板上液體輸送系統
  • 混合頻率電漿功能,可以微調應力
  • 自動壓印盤冷卻,適用於臨界低溫 [<175°C] 封裝應用
  • 單晶圓及多晶圓預熱腔室選項,可以為敏感型基板進行除濕氣處理
PECVD 服務的市場:
 

產品影像:

 
Delta® PECVD

Delta® PECVD

The Delta® PECVD systems are used for a wide range of applications within MEMS, compound semiconductors, and advanced...

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