電漿蝕刻


Omega® 蝕刻系統


SPTS 針對 MEMS、先進封裝、LED、高速 RF IC 及功率半導體領域的多種應用程式提供先進的蝕刻技術。
 
蝕刻技術

Omega® Rapier / DSi / DSi-v

Omega® Rapier / DSi / DSi-v

With an installed base of >1200 DRIE process modules, SPTS’s industry-leading position is spearheaded by the Rapier module, which etches Si using...

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Omega® ICP

Omega® ICP

SPTS ICP process module is highly flexible and etches a wide range of materials including oxides, nitrides, polymers, low aspect ratio Si and...

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Omega® Synapse™

Omega® Synapse™

Omega® Synapse™ etch process module uses a high density plasma source and is designed to etch strongly bonded...

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