Thermal Products

Under agreement with SPP Technologies Ltd (SPT), SPTS offers a range of large batch vertical furnaces (LPCVD), and APCVD systems.  We are able to offer both new and factory-certified re-manufactured furnaces, as well as customer system conversions to meet specific engineering requirements.  The production-proven vertical furnaces deliver superior results, high productivity and the lowest cost of ownership (CoO).

The APCVD product line is based on patented Watkins Johnson (WJ) linear injector technology enables precise, repeatable deposition of doped or undoped films with no transient film properties and uniform gap fill across the wafer.  Only factory-certified re-manufactured APCVD systems (based on WJ-999 / WJ1000 / WJ1500 models) are available.

 

 

Vertical Batch Furnaces

Vertical Batch Furnaces

  根據與 SPP Technologies, Ltd. 所簽訂的協議,SPTS...

APCVD

APCVD

根据与 SPP Technologies, Ltd. 签订的协议,SPTS 为基于 SiH4 或 TEOS 的电介质的常压 CVD 提供解决方案。这些 APCVD 产品系列基于荣获专利的 Watkins...

APCVD