HF 释放蚀刻

Primaxx® 蚀刻系统

从用于研发的实验室系统到用于大批量生产的多腔集群工具,SPTS 提供范围最广泛的干燥 HF 蒸汽释放产品。行业领先的 Primaxx® HF 蒸汽蚀刻释放技术可用于去除受到破坏的氧化硅层,这主要是为了在 MEMS 设备中释放硅微结构。

我们专有的干燥工艺可避免释放出来的活动部件粘滞和对精细结构造成损坏——在传统的湿法工艺技术中,这些问题十分常见。

在降低压力和升高温度的条件下,无水 HF 蒸汽与酒精蒸汽相结合可提供宽泛、稳定的工艺窗口,从而应对不同氧化物和厚度,同时对 MEMS 设计中发现的其他常见材料保持高选择性,包括镜子和焊盘等外露的铝/合金特征。

产品系列 

Primaxx® Monarch300

Primaxx® Monarch300

The Primaxx® Monarch300 is a fully integrated, automated VHF etch tool designed to perform selective MEMS etch release via a controlled...

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Primaxx® Monarch 25

Primaxx® Monarch 25

The Monarch25 is a 25-wafer batch process module designed for medium to high volume HF release etch production applications in either the...

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Primaxx® Monarch 3

Primaxx® Monarch 3

The Monarch 3 is a compact module includes a 3-wafer process chamber, and is designed for research laboratory and small volume production...

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Primaxx® uEtch

Primaxx® uEtch

SPTS's uEtch is a single-wafer system specifically designed for university and small research laboratories. Fully integrated,...

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