MVD®

分子气相沉积 (MVD®) 系统

MVD® 用高度可重现的气相沉积方法取代了传统的液相包裹工艺,该新方法非常适合制造应用。

受益于 MVD® 疏水性防粘连薄膜的典型 MEMA 设备包括显示屏、传感器、致动器、射频开关、喷墨打印机和数据存储设备。生物 MEMS 应用包括微流体中的润湿控制(芯片实验室、微板块)、植入式装置的钝化处理、需要生物相容性表面涂层的设备,以及需要功能化表面涂层的设备。

MVD® 也可用于需要防潮层、防腐蚀涂层或释放层的商业应用,以进行压印。

产品系列 

MVD100E

MVD100E

The MVD100E is SPTS's designated tool for R&D or pilot manufacturing. MVD® is finding increasing use in applications requiring moisture...

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MVD300 / MVD300E

MVD300 / MVD300E

The MVD300® (and MVD300E with an EFEM) are designed for high performance, flexibility and reliability for the most demanding high volume...

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MVD4500

MVD4500

The MVD4500 is our panel and large substrate tool. It is capable of handling multiple substrates with sizes up to 930 x 720 mm. It is the only...

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Inquiry about: Molecular Vapor Deposition (MVD®)

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