LPCVD/扩散

根据与 SPP Technologies, Ltd. 签订的协议,SPTS 为其客户提供一系列立式熔炉管。我们能够提供全新设备和经工厂认证的翻新改造设备,以及依据客户需求定制的升级改造,以满足特定的工厂要求。具有量产经验的立式熔炉管可提供出色的工艺结果、高产出和最低的CoO。
 
产品:
 
多样化低压化学气相沉积 (LPCVD) 扩散工艺组合包括:
  • 湿法/干法热氧化
  • LPCVD 氧化物 (HTO)
  • 化学计量和应力控制的 LPCVD 氮化硅
  • LPCVD TEOS
  • 有掺杂或无掺杂 的LPCVD 多晶硅
  • 低温 LPCVD SiGe
  • 100°C 至 1200°C 以上的退火工艺
 
LPCVD 服务的市场:
AVP / RVP

AVP / RVP

The AVP/RVP vertical batch furnace delivers superior process results, the lowest cost of ownership (CoO)...

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RVP-300plus

RVP-300plus

The RVP-300plus vertical batch furnace is a flexible platform for...

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Inquiry about: Vertical Batch Furnaces

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