LPCVD/Diffusion for LED Manufacturing

SPTS’s large batch vertical furnace products offer low temperature atmospheric and vacuum anneal solutions ideally suited LED anneals applications.

Benefits of SPTS LPCVD/Diffusion for LED manufacturing:

  • Ag anneal
    • Up to 5% better power efficiency
    • Superior post anneal reflectivity
    • Higher Lm/W
  • Epitaxial anneal
    • Achieved 4% reduction in Vf
    • Precise control of Ag surface to maximize reflectivity

Related Product Information

LPCVD Product Information